Location: Maryland Hall 45 (basement level)
Contact information for training: Please contact Phil Chapman ([email protected]) in the Department of Materials Science and Engineering.
Reservations: iLab Reservation System (Click Here).
Manufacturer: Laurell Technologies Corporation
Capabilities:
Speeds of up to 6,000 RPM can be used on the spin coater.
Can handle up to 4” wafers on a vacuum chuck.